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angle of incidence |
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angle of incidence
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| Optical scattering measurements using a newly constructed light scattering instrument were conducted at various incident angles in the specular, off-specular, and out-of-plane scattering configurations on a variety of scratch profiles. nbsp;has the unique property of returning light on the same path of its origin over a wide range of incident angles. By measuring the reflectance of the laser light from the wafer, at each of the incident angles within the illumination cone, the Opti-Probe is able to determine the thickness and optical properties of films on the wafer surface. |
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