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mobile ion

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mobile ion

In chemistry, an ion that is free to move; such ions are only found in the aqueous solutions or melts (molten masses) of an electrolyte. The mobility of the ions in an electrolyte is what allows it to conduct electricity.



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On the other hand, the ionic mobility increases as the lengt of flexible PEO side chains increases, since$the mobile ions can be transported by segmental motion of the flexible side PEO chains.
But unlike oxygen plasma cleaning, the new, CO2-based dry process won't promote any oxide layer growth, silicon loss or mobile ion diffusion, which can negatively affect device performance.
Cabot Microelectronics' scientists have discovered how to leverage proprietary chemical know-how to enable a significant reduction in CMP-induced defects while lowering the concentration of mobile ions introduced during the CMP process.
 
 
 
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